A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Question on AZ400k and AZ300MIF
Question on AZ400k and AZ300MIF
2005-05-12
Brubaker Chad
Question on AZ400k and AZ300MIF
Brubaker Chad
2005-05-12
The primary difference between the two is the base salt that is used for
development purposes.  AZ300MIF is TMAH based (the MIF stands for "metal
ion free"), and the AZ400K uses KOH.

The information I have received from AZ is that the AZ400K will tend to
develop a little faster, and provide a bit better sidewall performance
(meaning more vertical sidewalls).  I have always tended to use a 1:4
dilution (1 part developer to 4 parts water) to develop AZP4620.

Best Regards,
Chad Brubaker

 -----Original Message-----
From: haixinzhu
Subject: [mems-talk] Question on AZ400k and AZ300MIF

Hello, All,

I have a question on the difference between AZ400k and AZ300MIF developer
used for AZP4620 photoresist. The official website
http://www.az-em.com/products/na/photoresists/thick_film.html shows the
developer is AZ300MIF, but I heard many people are using AZ400k
developer.

Anyone can help me out on this, thanks

Michael
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
MEMS Technology Review
Addison Engineering
Process Variations in Microsystems Manufacturing