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MEMSnet Home: MEMS-Talk: Re: Au Thickness vs. Conductivity
Re: Au Thickness vs. Conductivity
2005-05-25
Harald Walter
Re: Au Thickness vs. Conductivity
Harald Walter
2005-05-25
Dear Ed,

unfortuinatly I do not have data about Au on Ti/glass.
Some data for Ag on polymer substrate can be found in:
C. Charton, M. Fahland; Surface and Coatings
Technology 142-144, 2001 p.175-180
The relevant paragraph is:
"Below the critical thickness d the increase
of the conductivity with increasing film thickness
is relatively steep, which can be explained with the
merging of individual islands. Above the critical
thickness the increase in the conductivity is reduced.
For a thickness of 20 nm the conductivity is
approximately one-third of the conductivity of the
bulk material. The weak increase in the conductivity
above d can be correlated to the growth of the Ag
grains in the film, reducing the grain boundary
scattering of electrons and thus improving the
conductivity of the films."

Harald

> does anyone have a reference or chart for the film
> thickness of Au and its conductivity (electrical).
> I would like to know how thin (<100nm) I
> can go before I start to lose conductivity
> throughout the entire film.
> I am depositing on glass with a 10nm Ti adhesive
> layer.




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