How about using a 150mm petri dish from Fisher/VWR?  BTW, do you have a
part number for the casting tray you use from Small Parts?

Lee Pang
[email protected]

-----Original Message-----
From: Dwayne Dunaway
Subject: [mems-talk] SU-8 on 6 inch wafers & PDMS casting trays

I am interested in casting PDMS on 6 inch wafers.

Two questions..

Does SU-8 give predictable thicknesses on 4 inch
wafers?

Does anyone have any recommendations for casting trays
for 6 inch wafers and PDMS?  We use these nifty little
aluminum trays from Small Parts Inc. for 4 inch wafers
but they are not available to fit 6 inch sizes.