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MEMSnet Home: MEMS-Talk: SU-8 on 6 inch wafers & PDMS casting
SU-8 on 6 inch wafers & PDMS casting
2005-05-25
Dwayne Dunaway
SU-8 on 6 inch wafers & PDMS casting
Dwayne Dunaway
2005-05-25
Opps, I meant to ask...

Does SU-8 give predictable thicknesses on 6 inch wafers?

thanks,

Dwayne
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