Dwayne,

SU-8 does give predictable thickness on 4" wafers, although, depending on film
thickness involved, there may be some need to deal with the edge bead. Anything
from about 15 µm and down has minimal edge bead issues.

Best Regards,
Chad Brubaker

 -----Original Message-----
From: Dwayne Dunaway
Subject:        [mems-talk] SU-8 on 6 inch wafers & PDMS casting trays

I am interested in casting PDMS on 6 inch wafers.

Two questions..

Does SU-8 give predictable thicknesses on 4 inch
wafers?

Does anyone have any recommendations for casting trays
for 6 inch wafers and PDMS?  We use these nifty little
aluminum trays from Small Parts Inc. for 4 inch wafers
but they are not available to fit 6 inch sizes.