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MEMSnet Home: MEMS-Talk: Non-photoactive resist
Non-photoactive resist
2005-05-26
Parijat Bhatnagar
2005-05-26
Isaac Wing Tak Chan
2005-05-26
Robert Black
2005-05-27
Eric TANG Xiaosong
2005-05-27
Brubaker Chad
2005-05-27
Brubaker Chad
Non-photoactive resist
Parijat Bhatnagar
2005-05-26
Dear Group,

1) I am looking for an organic resist-like material which can form a 200 to
1500 nm thick coating by spinning. It should not dissolve in water or
developer.

2) I also want to protect it from dissolving when I would spin the
photoresist on it.

Shipley's FSC-M or MicroChem MX 6C are two such material but I am not able
to locate the datasheets for it on the internet or the company's web-site.

Kindly suggest.

Pari.
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