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MEMSnet Home: MEMS-Talk: Re: XeF2 Silicon Etching
Re: XeF2 Silicon Etching
1998-03-13
[email protected]
1998-03-13
Robert Dean
1998-03-13
Albert K. Henning
1998-03-13
Paul M. Zavracky
1998-03-13
[email protected]
1998-03-13
Michael Young
Re: XeF2 Silicon Etching
Paul M. Zavracky
1998-03-13
Dear Mr. Avi Laker,

We have constructed a XeF2 etcher and use it to etch large area features
50-60 microns deep.  If you are interested in details, please call me at
617-373-2919.

Paul Zavracky


Avi Laker wrote:

> We have an immidiate application in high volume manufacturing for
> etching silicon about 75u deep on both sides of the wafer.
> Would love to chat with someone.
>
> avi laker
> Teccor Electronics
> 972-756-8237


reply
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