I've found Filmtronics very helpful.  I recommend speaking to Jon
Bennett -- he helped me pick exactly the SOG I needed.

info for filmtronics:

Filmtronics, Inc.
Advanced Semiconductor Processing Materials
675 Saxonburg Road
Butler, Pennsylvania 16002
United States of America
Phone:+1 (724) 352 - 3790
Fax: +1 (724) 352 - 1772

-----Mensaje original-----
De: Krishna Vummidi [mailto:[email protected]]
Asunto: [mems-talk] reg: spin on glass

Im trying to find information on Spin on glass (SOG). I need to use it as a
dielectric layer which i should be able to pattern using normal positive photo-
resist and etch back (say using HF). The maximum thickness i need to go is about
2-3 um. Any suggestions of other patternable dielectric material is also
welcome. The vendors i have contacted have posed a limitation on thickness on
SOG due to films cracking at higher thickness/temp.

thank you,
krishna