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MEMSnet Home: MEMS-Talk: Non-photoactive resist
Non-photoactive resist
2005-05-26
Parijat Bhatnagar
2005-05-26
Isaac Wing Tak Chan
2005-05-26
Robert Black
2005-05-27
Eric TANG Xiaosong
2005-05-27
Brubaker Chad
2005-05-27
Brubaker Chad
Non-photoactive resist
Brubaker Chad
2005-05-27
One thing I forgot to mentione - Cyclotene (BCB) performs very well at
thinner layers when diluted with its casting solvent (Mesitylene). I
also believe Dow is working on thinner versions of the material. Either
should act as a solution for the film thickness you are interested in.

Best Regards,
Chad Brubaker
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