Could any one give some tips on using ProTEK from Brewer
Science? I am depositing it on TEOS and on nitride. I get
pin holes in it and TMAH gets into them and etches the
wafer. Also, sometimes it peels off. I'd very much
appreciate advice.
Thanks,
Elena

---- Original message ----
>From: "Joe Lonjin" 
>Subject: RE: [mems-talk] Any metal as KOH masking layer?
>
>Why metal? Use Nitride or get Protek from Brewer Science.