Hi Karan,

Several negative resists for E-Beam lithography available on the market,
such as:

1. (Vendor name) Rohm & Haas Electronic Material (Former SHIPLEY)
   (Resist name) SAL601, resolution approx. 100 nm,  thickness 400nm

2. Sumitomo Chemical Co.
   NEB-22    resolution approx. 100nm  (50nm available with thiner
   resist layer) Standard thickness 400nm

3. TOKUYAMA Co.
   TEBN-1 (High resolution inorganic resist) Highest resolution 10nm
   (30nm thickness) (Extremely low sensitivity)


Best regards,
Eric
-----Original Message-----
From: Karan deep [mailto:[email protected]]
Subject: [mems-talk] Negative E-beam Resist

I am looking for Negative E-Beam Resist with high resolution .If
somebody knows about any good E-Beam resist please let me know and I
would also like to know the supplier for e-beam resist .