You need to use the adhesion promoter they sell, and follow the bake
steps for the promoter and for the ProTEK. Plus the parameters can be
varied to achieve different results. There are some data sheets on their
website which can help you to develop some tests to try.

Joe Lonjin
Penn State Nanofabrication Facility
College of Engineering

-----Original Message-----
From: [email protected] [mailto:[email protected]]
Subject: RE: [mems-talk] Any metal as KOH masking layer?

Could any one give some tips on using ProTEK from Brewer
Science? I am depositing it on TEOS and on nitride. I get
pin holes in it and TMAH gets into them and etches the
wafer. Also, sometimes it peels off.