> This method sounds interesting.  Can you elaborate more on
> this method (e.g. UV wavelength and power, specialized
> equipment required, etc.) or provide a reference?

Lee,

   A good discussion of UV ozone cleaning can be found in Vig J R
"UV/ozone cleaning of surfaces," in J Vac Sci Tech A 3(3), 1985.
Although the application of PDMS bonding is not mentioned, the article's
focus, obtaining a near-atomically clean surface, is certainly the key
to good bonding of any two substrates.

John Maloney
MicroCHIPS, Inc.
www.mchips.com
www.john.maloney.org