Brian,

The standard pickling solution in the non MEMS world is 1 M HCl.  I
can't imagine your oxide is too thick so a few seconds should do the
trick.

Gabriel

> From: Brian Dick 
> Subject: [mems-talk] Etching of Fe evaporation starters

> We have been having problems with our Fe slugs oxidizing
> post-evaporation run.  This is probably due to their being too hot
> when the chamber is vented, although effort has been made to ensure
> sufficient cooling.  In any event, we are possibly finding that this
> oxide formation is affecting our later growths.  Do you know of an
> etching solution that we can dunk our Fe in (it's a 7cc starter) to
> remove this oxide?  I am presuming it is an oxide layer -- it comes
> out with a rust/brown appearance.