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MEMSnet Home: MEMS-Talk: best material for laser ablation
best material for laser ablation
2005-06-13
Clements, Jim - Erie
2005-06-14
Mac Daily
2005-06-13
Michael D Martin
best material for laser ablation
Michael D Martin
2005-06-13
What wavelength is the laser? For an excimer you can use photo resist or
polyimide. Both will work fine though you might have to do an O2 descum to
get everything.

-Mike Martin
 U. of Louisville

>>> [email protected] 06/13/05 11:01 AM >>>
I am looking to spin coat 'something' onto glass and or silicon surfaces,
then dry or bake it, then laser ablate it (to expose the underlayment-ie,
the glass or Si.)

Does anyone have any suggestions ?
The trick is something that 'burns' away easily
without damaging the glass or si.
reply
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