Hello Jim,
SU-8 will work fine with Excimer laser ablation. Energy density about
0.5J/cm2 will ablate SU-8 without damaging glass.
Regards,
Alex Pozdin
Laser Light Technologies

From: "Clements, Jim - Erie" 
Subject: [mems-talk] best material for laser ablation

I am looking to spin coat 'something' onto glass and or silicon surfaces,
then dry or bake it, then laser ablate it (to expose the underlayment-ie,
the glass or Si.)

Does anyone have any suggestions ?
The trick is something that 'burns' away easily without damaging the glass
or si.