Transene Chromium Mask Etchant is another good choice.


-----Original Message-----
From: Bin Liu [mailto:[email protected]]
Sent: Tuesday, June 14, 2005 12:27 PM
To: 'General MEMS discussion'
Subject: RE: [mems-talk] Etching of Cr on Silicon

Try cr14?

-----Original Message-----
From: Daniel Schwaab
Subject: [mems-talk] Etching of Cr on Silicon

I want to remove a Cr layer which I used as a mask for RIE etching of a
silicon wafer.
Which method is best to remove the Chromium without damaging the
silicon?