Hi all,

Does anyone know (or a reference) how the dielectric strength of thermal
grown SiO2 (dry oxidation, > 1 micron) behaves over a wide temperature
range, i.e. from 300K up to 1300K !!! I know that it will go down
drastically with temperature.

I found a lot of information for room temperature and temperatures
up to 400K but nothing for this range.

Thanks a lot !

Mario
Stanford University
E-mail: [email protected]