Hello,

You should probably ask the manufacturer to supply you with this kind
of data. If not you can calibrate the thickness vs velocity by
ellipsometry measurements.

I hope it helps

Regards,

Cristian


On 6/16/05, Julie Verstraeten  wrote:

> I'm looking for any formula that relates the layer thickness to derotation
> velocity in the spin-coating process for AZ 5214E photoresist.
>