Hi,
I have started working on thin film sol-gel PZT. I searched either in
the web and our list but cannot find satisfactory information in
detail.
I need to etch PZT on Si/SiO2/Ti/Pt wafer using dry or wet etch
methods. But our RIE has only SF6, CHF3, and O2. So I am looking for a
wet etch solution. I tried different solutions such as 10:1 BOE, 2:1
HCl:DI, and 50:50:1 DI:HCl:HF but could not get fine results. Because
etchant should be selective to Pt, I am trying to avoid HF contents.
If anyone has some idea or some experience to share, I will be appreciated.

Thanks,

Tolga