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MEMSnet Home: MEMS-Talk: In-situ Temperature Measurement
In-situ Temperature Measurement
1998-05-01
BURKE, JOHN
In-situ Temperature Measurement
BURKE, JOHN
1998-05-01
Hello Colleagues,

I'm looking for in-situ, contact temperature measurement on the backside
of silicon wafers.  The wafers are in a vacuum chamber with radiant
heating-- so no contact with something as convienient as a chuck for
temperture measurement/approximation. Any ideas?

Thanks,
John Burke


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