Hello all,

(Sorry to resend the same question but there was some problem with micron
and temperature symbols...)

I have to spin-coat 1 micron (or a little more) thick layer of AZ 5214E
resist on silicon sample. I now know about the relation
"thickness/rotation velocity"  (thank you for that).

Does someone know about the spin time (is 45sec ok?) and the post softbake
time and temperature (115 Celsius degree/30sec?).

Thank you