Hi, Zhu,

Yes, O2 plasma will attach Teflon. I'm using O2 plasma to pattern Teflon
film and it works very well.

Zhiliang

At 08:30 PM 6/21/2005, you wrote:
>Dear all,
>We use a teflon holder to hold wafers. I wonder
>whether it can be etched during the wafer cleaning
>process by using O2 plasma. Can anybody tell me?