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MEMSnet Home: MEMS-Talk: resist for wet-etching GaAs
resist for wet-etching GaAs
2005-06-23
Zoltan Voros
resist for wet-etching GaAs
Zoltan Voros
2005-06-23
Hi,

I would like to wet-etch GaAs, using a bromine-methanol mixture. Does
anyone know a proper resist material to mask the GaAs wafer, so that I
could etch patterns on that?

Many thanks,
Zoltán Vörös

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