Simon,
   Reactive sputtering probably won't work.  Usually, people sputter from a
ceramic ZnO target in a Ar/O2 mix to make up for oxygen lost in the
sputtering process.  This requires RF power.  There are many papers on this.
  The ZnO may be a contaiminate to the system, depending on what else is
done there, so be forewarned.

-Lou

>From: Simon Garcia 
>Subject: [mems-talk] Sputtered ZnO
>
>I would like to make a film of ZnO to test a chemical sensor. I do not know
>much about sputter deposition, but I am working with a colleague to use his
>chamber for sputtering. He has DC magnetron to sputter metals, but he is
>not familiar with sputtering insulators. So I thought maybe we can sputter
>metallic Zn in small partial pressure of oxygen. Does anyone have
>experience with this? Or to recommend references on this type of
>deposition?