Hello, Wouter,

I have done some works to use photopatternable silicone (WL-5000, Dow
Corning), instead of PDMS, to fabricate MEMS devices.

Wenyue Zhang, Joseph P. Labukas, Svetlana Tatic-Lucic, Lyndon Larson,
Thirumalesh Bannuru, Richard P. Vinci, and Gregory S. Ferguson; "Novel Room-
Temperature First-Level Packaging Process for Microscale Devices",  to be
published in Sensors and Actuators A, Physical.

http://www.lehigh.edu/%7Ewez6/2004_SNA-ESCWBonding-Lehigh_Final.pdf

Hope useful to you and Good luck!

Lydia


Quoting Wouter Meuleman :

> Hi, we are interested in using PDMS structures on top of silicon patterened
> with electrodes, and I was wondering if there are any companies out there
> that have experience with this.