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MEMSnet Home: MEMS-Talk: Thin PDMS Films
Thin PDMS Films
2005-06-27
[email protected]
Thin PDMS Films
[email protected]
2005-06-27
Joe Grogan,

Best way I found to get thin PDMS off of photoresist on silicon molds was
to dunk the whole thing in ice water - cold contracts the mold and the
water swells the PDMS. A minute or two and it peels right off intact.

Those were 30 microns thick layers. If you have adhesion problems, I found
that coating my mold with acrylic enamel paint worked well.

Mike
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