Joe-
I have experience making PDMS films ~ 75um to 150um thick. Basically, using
a variable height silk screening squeege, parafilm wax sheets, metal shim
stocks, a very flat surface, tape, and industrial grade PDMS (RTV); the PDMS
was mixed 10:1 (standard mix ratio) and squeeged on the parafilm. The cure
time is ~ 24hrs room temp. Once the pdms cures on the parafilm it is easily
peeled off and ready for use. Using this technique I think the limit is a
PDMS film thickness of 25um, due to their fragility.
If you are using a mold with deep features, a spray on mold release agent
may help.
Good luck!
--
Patrick Roman, M.S.
Microsystems Engineer
Code 553 - Detector Systems Branch
Room E042 Building 11
NASA - Goddard Space Flight Center
Greenbelt, MD 20771
phone: (301) 286-3558
fax: (301) 286-1672
cell: (202) 294-8602
email: [email protected]
-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of
[email protected]
Sent: Friday, June 24, 2005 11:56 AM
To: General MEMS discussion
Subject: [mems-talk] Thin PDMS Films
Hi all,
I was wondering if anyone has experience casting thin films of PDMS by
clamping down the mold in order to get a film that is as thick as the
features
on the mold. If so, does anyone have suggestions/tips on removing the film
from the mold once it's done? I've been having trouble with tearing the film
as I try to peel it off by hand.
thanks,
Joe Grogan
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