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MEMSnet Home: MEMS-Talk: Thin PDMS Films
Reg: problems with SU-8 bonding to the silicon wafer
2005-06-23
Vishwanath Somashekar
2005-06-23
[email protected]
2005-06-23
Vishwanath Somashekar
Thin PDMS Films
2005-06-24
[email protected]
2005-06-25
Tolga Kaya
2005-06-27
Patrick Roman
2005-06-23
Brubaker Chad
2005-06-24
Brubaker Chad
2005-06-27
Vishwanath Somashekar
2005-06-29
Brubaker Chad
2005-06-30
Vishwanath Somashekar
Thin PDMS Films
Patrick Roman
2005-06-27
Joe-

I have experience making PDMS films ~ 75um to 150um thick.  Basically, using
a variable height silk screening squeege, parafilm wax sheets, metal shim
stocks, a very flat surface, tape, and industrial grade PDMS (RTV); the PDMS
was mixed 10:1 (standard mix ratio) and squeeged on the parafilm.  The cure
time is ~ 24hrs room temp.  Once the pdms cures on the parafilm it is easily
peeled off and ready for use.  Using this technique I think the limit is a
PDMS film thickness of 25um, due to their fragility.

If you are using a mold with deep features, a spray on mold release agent
may help.

Good luck!

--
Patrick Roman, M.S.
Microsystems Engineer
Code 553 - Detector Systems Branch
Room E042 Building 11
NASA - Goddard Space Flight Center
Greenbelt, MD  20771
phone: (301) 286-3558
fax:   (301) 286-1672
cell:  (202) 294-8602
email:  [email protected]

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of
[email protected]
Sent: Friday, June 24, 2005 11:56 AM
To: General MEMS discussion
Subject: [mems-talk] Thin PDMS Films


Hi all,

I was wondering if anyone has experience casting thin films of PDMS by
clamping down the mold in order to get a film that is as thick as the
features
on the mold. If so, does anyone have suggestions/tips on removing the film
from the mold once it's done? I've been having trouble with tearing the film
as I try to peel it off by hand.

thanks,
Joe Grogan
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