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MEMSnet Home: MEMS-Talk: Photoresist for GaAs
Photoresist for GaAs
2005-06-30
Anton V. Chakhmatov
Photoresist for GaAs
Anton V. Chakhmatov
2005-06-30
Hello All,

What is a good photoresist for etching GaAs in H2SO4/H2O2?

Thanks,
Anton
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