Mathew,

If you are saying that you would like to thermally reflow SU-8 so that
high aspect ratio pillar structures sag into each other to form an arch,
then, unfortunately, the answer is: no, you will not be able to do this.
Once it has been exposed/crosslinked/developed, SU-8 does not, for all
intents and purposes, have a glass transition temperature (it will begin
to thermally decompose before a glass transition temperature can be
achieved).

Best Regards,
Chad Brubaker

-----Original Message-----
From: mathew varghese
Subject: [mems-talk] Reflow for SU-8 photoresist

Hello..
  My problem is, can SU8 photoresist be subjected to thermal overflow to
produce an arch like structure on which metal can be deposited? I want
to obtain a metal inductor in an arch like fashion after the SU8 is
developed and removed.. Can somebody help please?