Hi Mathew

We have done some thermal reflow of SU8 cylinders,which in turn get
tranformed to hemispheres.Ofcourse our aim was to make microlenses.I guess
you can use other shapes like cubes,cuboids,ellipses,etc to get your desired
profile.


Mohammed Ashraf



>From: mathew varghese 
>Subject: [mems-talk] Reflow for SU-8 photoresist
>Date: Sat, 2 Jul 2005 22:01:47 -0700 (PDT)
>
>Hello..
>   My problem is, can SU8 photoresist be subjected to thermal overflow to
>produce an arch like structure on which metal can be deposited? I want to
>obtain a metal inductor in an arch like fashion after the SU8 is developed
>and removed.. Can somebody help please?