Hello,
I'm working on a capacitive microforce sensor. I will soon need to calibrate it.
For that purpose, I need to apply known forces on the tip of a 50micron x
70micron cross-section probe and measure the resulting change of capacity.
Does someone have some advice about which kind of actuator to choose for the
application of forces (0-200microN) and which kind of capacitance measurement
circuit (C~e-13F) to build.
Thank you very much,
Julie.