I'm trying to etch off about 100nm of ITO from glass coverslips,
probably using AZ 3617 resist.  It's important the glass remains
transparent.  I can't do liftoff because I can't do the ITO
deposition at our facility, I order it.

I've found a bunch of suggestions for an etchant, but there doesn't
seem to be much consensus...  17% HCl?  Diluted aqua regia?  Diluted
NaOH?  HF?

I would be very grateful if someone can tell me if they know
specifically that something works, what concentration, and
temperature.  My ITO source is expensive, so I can't afford too much
experimentation, unfortunately.

Thanks!
thomas
tjerde at stanford dot edu