Hi Simon,

SAMs usually don't survive long immersion in liquids (especially polar), but
we developed special technique to boost immersion (and thermal) stability of
vapor deposited SAMs. We use special "adhesion" layer to improve attachment
of SAM to the surface and increase SAM density. You may find some details in
our publications (proceedings of SPIE 2005 or NSTI 2005)- "Durable
Anti-Stiction Coatings by Molecular Vapor Deposition (MVD)"

Boris Kobrin, Ph.D.
Director of Technology
Applied MicroStructures, Inc.
4425 Fortran Drive
San Jose, CA 95134
(408) 594-0654



Message: 10
Date: Mon, 18 Jul 2005 22:36:19 -0400
From: Simon Garcia 
Subject: [mems-talk] Stability of silane-based SAMs
To: General MEMS discussion 
Message-ID: 
Content-Type: text/plain; charset=US-ASCII; format=flowed

Hello,

I would like to functionalize a SiO2/Si or glass surface to improve
film deposition of metal oxides on the substrate. I think SAMs based on
organosilicon molecules, is the best way to go. The problem is that my
film deposition occurs in H2O, at pH=10 and temperature of 75 deg C,
and I'm afraid the basic conditions will attack the monolayer.

Does anyone have experience with organosilane monlayers, and had
problems with stability in aqueous solution?

Where can I find studies on the stability of these monolayers in
different environments?

Thanks,
Simon Garcia