Hi,

the very wellknown Products of Dow Corning for MEMS are Sylgard(s) 182(184,
186).
Please see below
http://www.dowcorning.com/applications/product_finder/pf_details.asp?l1=009&
pg=00000029&prod=01064291&type=PROD
But the same products have other firms (ABCR and Wacker Silicones) to.
You can seek on following web sites:
http://www.abcr.de/englishhtml/Produkte.htm
http://www.wacker.com/internet/noc/Products/
By googling you can find a lot of articles and proceedings with theirs
products.

Good luck,

Vitali Emelianov