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SiNx dry etch
SiNx dry etch
2005-07-21
William Lanford-Crick
RE: SiNx dry etch
2005-07-22
Tripp, Marie Kathleen
Diaphragms
2005-07-28
anurekha
2005-07-29
shay kaplan
2005-07-30
anurekha
SiNx dry etch
William Lanford-Crick
2005-07-21
Hi, Does anybody know of a dry etch for Silicon Nitride that does not contain Fluorine? Thanks, Bill
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