S1813: time and temperature hardbake before Si DRIE
Bill Moffat
2005-07-22
Julie,
For really vertical side walls that are close to impervious to
temperature profile changes up to temperatures like 400 C you need image
reversal. Contact me for all the details.
Bill Moffat, CEO
Yield Engineering Systems, Inc.
2185 Oakland Rd., San Jose, CA 95131
(408) 954-8353