Dear ,

PDMS can be bond with PDMS, glass and Si after the treatment of oxygen
plasma. ( You can use plasma cleaner or RIE )

C.M. Lin
NTU, Taiwan, R.O.C

-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Wednesday, July 27, 2005 12:16 PM
To: General MEMS discussion
Subject: [mems-talk] PDMS bonds to silicion wafer?

Hello all,

Recently people are discussing about bonding between PDMS and glass and
bonding between PDMS and PDMS.
I am wondering anyone has experience of bonding between cured PDMS and
silicon?
Thanks,

chengsheng