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MEMSnet Home: MEMS-Talk: Cryopump vibration
Cryopump vibration
1998-05-12
Lyn Bowman
Cryopump vibration
Lyn Bowman
1998-05-12
My firm has been approached by someone suggesting that we develop a low
vibration cryopump.  He says there is a market for a reduced vibration cryopump,
because vibration in cryopumps reduces yield in vacuum deposition processes and
stirs up dust in vacuum inspection processes.

Does vibration in cryopumps really cause such problems?


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