Hi,
RF MEMS , HFSS or IE3D along with coventorware will be sufficient.

----- Original Message -----
From: "Mukund Raman" 
To: "General MEMS discussion" 
Sent: Sunday, July 31, 2005 4:06 AM
Subject: Re: [mems-talk] RF MEMS

Hi Hitesh,

I am working on a resonator design using Coventorware. Is there a
specific device that you are working on?