Hi,

   Do you have adhesive layer between SiO2 and gold?
   I used to have sputtering SiO2 on top of gold.
   My experience is if you have too thick adhesive layer, more than 30 nm,
it's easy to crack when you are doing post-process.
   Wish that help.

Richard

----- Original Message -----
From: "mojgan daneshmand" 
To: "General MEMS discussion" 
Sent: Tuesday, August 02, 2005 7:49 PM
Subject: [mems-talk] SiO2 over gold


> Hi everyone,
>
> I am having problem with PECVD SiO2 over gold film. Our oxide film looks
> perfectly fine over any surface rather than gold. It cracks over any gold
> pattern. Has anyone seen any similar problem? any idea how I can fix the
> problem?