no.
http://microlab.berkeley.edu/labmanual/chap1/JMEMSEtchRates2(2003).pdf
  ---------- Forwarded message ----------
From: "Kirstin Hoppe" 
To: 
Date: Wed, 3 Aug 2005 17:26:36 +0200
Subject: [mems-talk] wet-etching copper with phosphoric acid
Hello,

does phosphoric acid copper attack with a wet-chemical etching process?

Thank you

Kirstin