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MEMSnet Home: MEMS-Talk: Any good recipe for Si etch in ICP?
Any good recipe for Si etch in ICP?
2005-08-04
baobao
2005-08-04
Shile
2005-08-08
Hongjun-ECE
2005-08-04
Jobert van Eisden
Any good recipe for Si etch in ICP?
baobao
2005-08-04
I am trying to do some Si etch. I use SF6 and Ar.
I hope to get straight side wall that is around 1
micro deep. But when I cleave and look it using SEM,
there are some undercut and the side looks like wet
etch.

i am not sure if anyone can give me some idea about
the recipe that i could use.

Thanks.
reply
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