Hi,

Does someone know good references about the physical and chemical behaviour of
Bosch process (C4F8/SF6).

I would like to better understand all the operations involved in DRIE:

-Chemical reactions (etching and passivation)
-Chemical vs physical etch
-effect of different parameters (coil and platen power, pressure,...)
-effect of O2
-notching and bowing effect
-...


Thank you,


Julie.