Cheng,

Generally for a line-space interference pattern you want the polarization
parallel to the lines.

Regards,
Fred

----- Original Message -----
From: "Cheng Lu" 
Subject: [mems-talk] laser interference lithography

> I am doing the three beam laser interference lithography with 355nm laser.
> My problem is that resulted pattern was partially interferenced. This
> becomes more obvious when the period goes to the smaller values like
> 400nm. I know here the polarization and distance is very important. The
> distance I am sure that was controlled very well. But for the
> polarization, I am not sure how can I set the best value, for example, the
> co-angle setting at 45 degree.
>
> Is there anybody who could give me any suggestion on how to work it out?
>