Sarkar,

Also bear in mind that SU-8 has a thermal cross-link reaction as well
(at 120C, if I remember correctly, although it may be as high as 150C).
It may have been that the temperature the SU-8 saw was too high.

Best Regards,
Chad Brubaker


-----Original Message-----
From: Jobert van Eisden
Subject: RE: [mems-talk] Metal deposition on unexposed SU-8

Hi Aniruddh,

I have done this using an e-beam evaporator. Depending on accelerating
voltage there will be some radiation, but in my case not enough to
expose the SU8. The problem I found with this is that during the post
exposure bake the SU8 will shrink, buckling your film on top.

Jobert van Eisden
SUNY Albany