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MEMSnet Home: MEMS-Talk: polysilicon resistor drift
polysilicon resistor drift
2005-08-09
CK Lin
2005-08-09
Behraad Bahreyni
polysilicon resistor drift
CK Lin
2005-08-09
Hello, Community,

I am having problem with my piezoresistors.  As soon as I touch them with
miltimeter probes(via two-point method), they drift upwards at a rate about
0.1 ohm every seconds.  as you can predict, with a large gain, small drift
can cause big calibration errors.

Does anyone know the most likely source?
Is it electromagnetic noise?
Is it motion?
Is it localized temperature variation?
Are the resistors leaky?

Here is a follow-up question, is there anyway to compensate or correct this
for pressure sensing?

Your suggestions will be much appreciated.

Best,

CK

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