Hi Yi,

Your equation looks like a quadratic equation. To find your k1 and k2, you
may use the quadratic formula to express the roots of your function in
terms of your coefficients. Then use the experimental data for the roots,
i.e., when J = 0, Cs = ? and ?. Solve for the coefficients from the
measured values of Cs.

Yours sincerely,

Isaac Chan, Ph.D.
University of Waterloo

On Fri, 12 Aug 2005, Yi Yao wrote:

> Hi All,
> Can anyone share me some general information about how to determine the
> kinetic constants? I'm doing research on release etch modeling. I tried to
> use a combined first-and-second order model, where J is represented as: J =
> k1 * Cs + k2 * Cs^2. However, I have difficulty to determine the kinetic
> coefficient k1 and k2.
> Any suggestions and information are highly appreciated!