Just a gentle reminder. Extended baking at 400C or so can produce thermal
donors in CZ silicon (tend to go n-type). 30 minutes apparently is no
problem but think twice before going several hours.
Roger Brennan
-----Original Message-----
From: Zhang Xuming
Sent: Wednesday, August 17, 2005 2:27 AM
To: [email protected]
Subject: [mems-talk] RE: Need properites of Single Crystal Silicon
Hi Anwar:
For bulky silicon, the poisson's ratio is 0.22 - 0.27, thermal conductivity
1.3 W cm-1°C-1, Thermal expansion coefficient 2.6·10-6°C -1.
Cannot find the
value of Jeta.
You may refer to http://www.memsnet.org/material/siliconsibulk/ and
http://www.ioffe.rssi.ru/SVA/NSM/Semicond/Si/index.html for more data and
more references.