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MEMSnet Home: MEMS-Talk: G line positive resist - non TMAH developer
G line positive resist - non TMAH developer
2005-08-18
Mac Daily
2005-08-19
Shay Kaplan
2005-08-22
Brehm, Harald
G line positive resist - non TMAH developer
Shay Kaplan
2005-08-19
Mac,
Can they use 0.25N KOH or NaOH?

shay

-----Original Message-----
From: Mac Daily
Sent: Thursday, August 18, 2005 10:57 PM
To: MEMS discussion
Subject: [mems-talk] G line positive resist - non TMAH developer

Hello Everyone,

Can anyone recommend a positive tone, G-line photoresist that does not use
TMAH as the developer.  I have a customer that needs such a material and we
don't manufacture one.
reply
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